منابع مشابه
Suppression of Stiction in MEMS
Stiction failures in microelectromechanical systems (MEMS) occur when suspended elastic members are unexpectedly pinned to their substrates. This type of device failure develops both in fabrication and during device operation, being a dominant source of yield loss in MEMS. Stiction failures require first a collapse force that brings the elastic member contact with the substrate followed by an i...
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Wafer-level testing of surface-micromachined sensors provides ncw challenges to the test community. Currently, there is no method available for performing direct measurements to assess faulty micromechanical structures. Most commercial methods use electrical measurements to deduce the physical source of failures in the micromechanical structure. As a result, the process of identifyang various f...
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The Membrane Deflection Experiment was used to test the mechanical response of freestanding thin film gold specimens. We present stress-strain curves obtained on films 0.3, 0.5, and 0.1 μm thick. Elastic modulus was consistently measured in the range of 53–55 GPa. Several size effects on the mechanical properties were observed including yield stress variations with membrane width and film thick...
متن کاملFabrication of support structures to prevent SU-8 stiction in high aspect ratio structures
We have previously demonstrated that it is possible to fabricate densely-packed high aspect ratio structures in SU-8 by means of a top-plate support member which stiffens the overall structure and prevents pattern collapse. In this work we have computed the tensile stresses induced in the top-plate structures due to the capillary forces that arise between the columns due to the surface tension ...
متن کاملLow Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System
This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described with principal design issues, the corresponding antistiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polymer sacrificial layers. Finally, RF meas...
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ژورنال
عنوان ژورنال: Applied Mechanics and Materials
سال: 2012
ISSN: 1662-7482
DOI: 10.4028/www.scientific.net/amm.190-191.794